ADD:ZhengZhou city high-tech zone
           TaoHuaLi no.5


The author: Released in:2013-07-23 Text size:【 Big 】【 Medium 】【 Small

Applications for S-SIC in high technology industries include components for semiconductor wafer processing such as vacuum chuks, chemical mechanmical polishing blocks and susceptors. These applications take advantage of S-SIC’s thermal expansion match to silicon, high elastic modulus, chemical inertness, and high thermal conductivity.S-SIC is well suited as a structural material for low mass wafer carrier components and rigid, dimensionally stable platforms with exceptional flatness for wafer lapping and polishing.


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